ASM Products
Both ASM International’s Front-end and Back-end product lines are positioned to serve the immediate and future needs of the semiconductor industry. ASM’s tools are engineered for leading-edge processes. Our engineering focuses on deposition quality and particle control with high throughput that results in low cost of ownership. With most of the newly installed semiconductor device fabrication capacity employing 300mm wafers, our system and process development as well as our sales efforts are concentrated on 300mm equipment. Today, we support high volume production systems at 90, 65 & 45 nanometers, and in close cooperation with our customers we are qualifying and testing new critical process equipment for line widths at or below 32nm. Simultaneously, we are developing new 22nm technologies in our laboratories.

ASM's front-end product portfolio includes both batch and single wafer processing technologies. This enables us to respond quickly to industry dynamics. Due to the inherent robustness of batch systems, we believe that they will retain their desirability, particularly in situations where cycle time is not a major factor. On the other hand, in selected applications, and especially those where cycle time plays an important role, single wafer processing may be preferred. ASM's flexibility and experience in both processes ideally positions us to address both markets.

 
ASM International Products
Front-End
  • Epitaxial reactors
  • Vertical furnaces
  • PECVD reactors
  • Cluster tools
  • Atomic Layer CVD tools
  • LPCVD tools
Back-End
  • Die attach tools
  • Wire bonders
  • Trim & form equipment
  • Encapsulation mold tools
  • Assembly automation & test equipment
Materials (Back-End)
  • Leadframes