Global technical support

​ASM Global Technical Support Services provides solutions to all your technical support requirements.

We enable you to achieve the best operational performance from your ASM equipment by providing proactive technical information through a high-quality, rapid response.

For our latest technical support information, please contact us using the details below.

Product Telephone Email
Epitaxial T: +1-888-ASM-SERV (276-7378)
International number:
T: +1-602-470-5984
tech.support.asma@asm.com
Vertical Diffusion T: +1-888-ASM-SERV (276-7378)
International number:
T: +1-602-470-5984
technicalsupport.vf@asm.com
ALD T: +1-888-ASM-SERV (276-7378)
International number:
T: +1-602-470-5984
technicalsupport.ald@asm.com
PECVD T: +1-888-ASM-SERV (276-7378)
International number:
T: +1-602-470-5984
technicalsupport.pecvd@asm.com
PEALD T: +1-888-ASM-SERV (276-7378)
International number
T: +1-602-470-5984
technicalsupport.ald@asm.com