Groundbreaking ALD technology
ASM identified the potential of ALD when few people in the world believed it was possible. We developed it over many years in R&D and now we are the leading supplier of ALD equipment and process solutions for the semiconductor industry. Our tools are running in the most advanced fabs worldwide including in volume manufacturing of 20nm devices.
Innovation is in our DNA. It’s what we eat, sleep and wake up to. For us it’s not just a word, it’s a way of living.
Tanja, Senior Product Director
Thermal product line roadmaps
It’s essential for us to have a development structure that helps us to be fast, to be first and to be the best. Each of the Thermal product lines has its own technology roadmaps where we lay out future technology developments. We create the roadmaps during ongoing, direct engagement with our customers. Ultimately, they are the end users who will ‘make or break’ the products so we listen hard to what they tell us.
From R&D to products
We work closely together with our corporate R&D site in Helsinki, Finland to understand the new capabilities and new chemical processes being explored there. We monitor their progress in R&D until the time is right for us to start creating a product based in the new processes or, in other words, to start ‘productizing’ the innovations that R&D has been working on.
High-speed innovation
Our customers need our innovations and they need them faster than ever. That means we have to be flexible and responsive to be able to innovate at high speed. At the same time, customers want both leading edge technology and high productivity so innovation alone is not enough. For this reason, we are present on-site in our customers’ factories providing service, maintenance and training – delivering the whole business solution.
Our product line locations
Our Thermal products business unit is located at three main locations: Phoenix, Arizona, USA, Almere, the Netherlands and Leuven, Belgium.
In Phoenix, we focus on ALD products like the Pulsar® XP ALD and EmerALD® XP ALD and Epitaxy products like our advanced Intrepid™ XP. While in Almere the focus is on the CVD Diffusion product line including our Advance® Series Vertical Furnaces that provide a wide range of high-productivity batch processing solutions for Oxidation, Anneal, Cure, ALD and LPCVD. Process integration development for all products is located in Belgium.
Every day brings new challenges and opportunities. This is what drives the people in our Thermal product lines. Do you think you have what it takes to bring the benefits of our leading edge products to customers?