ASM Flowable Carbon
Kyle Campbell, Senior Manager Process Engineering, explores how ASM materials discovery innovation led to the market’s first PECVD Flowable Carbon film engineered for the increasingly complex demands of advanced patterning.
ASM Flowable Carbon
Kyle Campbell, Senior Manager Process Engineering, explores how ASM materials discovery innovation led to the market’s first PECVD Flowable Carbon film engineered for the increasingly complex demands of advanced patterning.
