Our technology & products
Big impact starts at the atomic scale
Our mastery of materials at the atomic scale is the foundation for the technology that makes our dreams become reality. Our breakthrough materials and deposition technologies power the chips that drive progress, enabling AI, electric vehicles, cloud computing, and next-generation healthcare.
This is the art of atomic layering: precision-built innovation with real-world impact.
Advancing progress through the art of atomic layering. That’s how we stay ahead of what’s next.
Technology and products
ASM delivers a focused set of core technologies that enable atomic level materials control in high volume manufacturing.
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Atomic Layer Deposition
Industry-leading precision for ultrathin, conformal films critical to advanced logic, memory, and packaging, enabling angstrom-level control at scale.
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Epitaxy
High-quality crystalline growth engineered for performance, yield, and ramp in advanced 3D architectures.
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Silicon carbide
Process equipment for epitaxial deposition of silicon carbide (SiC) is a fast-growing market, mostly due to the material’s benefits for electric vehicles. With our history in epitaxy equipment, this is a natural fit for our line-up.
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PECVD
Flexible dielectric deposition enabling low-temperature processing for advanced packaging and integration flows.
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Vertical furnaces
Vertical furnaces offer very high productivity solutions for a wide range of thermal processes including low pressure chemical vapor deposition (LPCVD), diffusion and oxidation.
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Global Services & Spares
Our services and spares business ensures our systems are properly installed and operate 24/7 in customer fabs worldwide. Outcome-based services enhance system performance through engineering innovations and continuous improvement, while lowering cost of ownership with refurbishment and upgrades, while adapting to evolving technical requirements.
Our R&D approach follows three levels
We conduct research into basic materials and processes, followed by process integration testing and then product development. This is how we sum it up:
R&D discovers new materials & processes
The first level is located in Helsinki, Finland. Here our team of researchers performs analysis and feasibility tests on new materials and chemistries in search of fundamental solutions.
Solutions are integrated into test devices
Next the viable candidate solutions are tested in process integration studies at one of our research partner facilities, such as IMEC in Leuven, Belgium, where full devices can be created.
Productized for volume manufacturing
The third level takes place at one of our product development centers, where the final equipment is developed for volume manufacturing of the advanced innovation solution.
Breakthroughs start with materials
Innovation is central to who we are, with over a quarter (27%) of our ASMers working in R&D, supported by sustained investment and strong partnerships with customers, leading research institutes, and universities, ASM is positioned as a leader in atomic-level materials engineering.
Our people turn atomic scale science into progress the world can see. From atom to impact, innovation at ASM starts with our people. We are the masters of materials: the scientists, engineers, and connectors who turn the impossible into reality
4,800+ employees, across 15 key locations
1,150+ employees in R&D
600M dollars invested in R&D
3,950+ patents in force
Our trademarks
We have registered a number of trademarks covering our product portfolio in the principal countries:
ASM, the ASM logo, Advance, Aurora, Dragon, Eagle, EmerALD, Epsilon, Intrepid, LPE logo, Powering The Future logo, Previum, Pulsar, Silcore, Sonora, Synergis, XP, and XP8 are registered trademarks of ASM. The ASM Qualified Licensed Supplier logo, AEGIS, A400, A412, ES, ESA, EVC, GenMatch, Level-to-Level, Precis, Tenza, and Velocity are trademarks of ASM.
