Service products
Outcome-based services that improve uptime, yield, and performance in high-volume manufacturing.
Preventative Maintenance (PM)
We offer a value-driven preventative maintenance (PM) program that ensures predictable costs and performance, enabling outcomes-based solutions addressing high-value problems (HVPs)
Service products
Transition from maintenance to predictive, performance-driven services. Supporting tool matching, drift control, and productivity optimization. Increasingly enabled by AI/ML-driven insights and automation.
Dry cleaning
High selectivity, acid-free, low waste part cleaning
Surface engineering
ALD coatings, modification, high-precision refurbishing
Automation tools
PM-bot robotic system for precision maintenance
For a guaranteed better uptime, lower defectivity, and higher performance consistency
10x selectivity improvement vs wet clean
5x longer usable part lifetime & better critical dimension (CD) control
95% approx. CO₂ reduction compared to “no refurb”
Zero media cleaning leading to minimal byproduct
