Management board



Mr. Loh was appointed as chairman of the Management Board and President and Chief Executive Officer of ASM International on May 18, 2020.

Benjamin was previously senior VP for Oerlikon Corporation, responsible for Asia. He then joined Veeco Instruments Inc., an American thin-film process semiconductor equipment manufacturer, as senior VP and general manager for Asia, before becoming executive VP, responsible for global field operations. Benjamin then joined FEI Company as a senior executive, holding various positions responsible for sales and service and global business operations, before becoming COO. He later joined VAT Vacuum Valves as executive VP and a member of the group management board, where he was responsible for worldwide sales and marketing. His vast experience includes roles as a non-executive director for several companies (Schneeberger, Schweiter Technologies AG, and Liteq BV). He was also an advisory board member of Semi China.

Benjamin has a bachelor's degree in electronic engineering from Tohoku University in Japan. A Singaporean national, he has lived in Japan, Hong Kong, China, the UK, and now the Netherlands.


Mr. Verhagen was appointed as a member of the Management Board and Chief Financial Officer of ASM International on June 1, 2021.

Paul has a proven track record and background in Dutch listed companies and the electronics industry. Starting in the early 1990s, he made a career at Royal Philips, fulfilling numerous executive positions in the Netherlands, the US, Hong Kong, and China. His last two assignments with the company – from 2007 until 2013 – were as executive VP and CFO of Philips Consumer Lifestyle, and executive VP and CFO of Philips Lighting. In 2014, he became the CFO and member of the Management Board of the Dutch stock-listed company Fugro N.V.

Paul holds a Master of Business Administration degree, and has a post-graduate degree as a Chartered Controller. He is a Dutch national.

Hichem M'Saad

Dr. M'Saad was appointed as a member of the Management Board and Chief Technology Officer as of May 16, 2022. As CTO, Hichem oversees ASM's technical product portfolio and future technologies and innovation. He has over 25 years of experience in the semiconductor equipment industry. Hichem joined ASM in 2015 as the Senior Vice President and General Manager of the Thermal Products business unit. From 2019 he held the role of Executive Vice President and General Manager of Global Products, including responsibility for developing ASM's ALD, Epi, VF, and PECVD products. In addition, he has been instrumental in several of ASM's new innovative and successful products, including the Intrepid ES, Synergis, Previum, and A400 DUO. Before joining ASM, he had a 15-year tenure with Applied Materials. He started his career as a process development engineer working on various dielectric CVD applications; he rose to the level of Corporate VP and General Manager of the Dielectric Systems and Modules (DSM) and the Chemical Mechanical Polishing (CMP) divisions. He also served as CEO of a start-up in the solar photovoltaic industry for six years.

Hichem M'Saad received his Bachelor of Science degree in Metallurgical Engineering from the Colorado School of Mines, his Master's degree in Materials Science & Engineering from Cornell University, and his Ph.D. in Electronic Materials Science from the Massachusetts Institute of Technology. He has authored 57 technical articles and holds nearly 200 granted patents.