Benjamin Loh

Chairman of the Management Board, President and Chief Executive Officer

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Benjamin Loh


Mr Loh was appointed as Chair of the Management Board and President and Chief
Executive Officer on May 18, 2020, for a period of four years. On February 12, 2024, ASM announced that Mr Loh will retire and step down as per the AGM on May 13, 2024.

Mr Loh worked for Oerlikon Corporation from the late 1990s until 2005. He became senior vice president in 2002 and was responsible for Asia until 2005. He then joined Veeco Instruments Inc., an American thin-film process semiconductor equipment manufacturer, as senior vice president and general manager for Asia, before becoming executive vice president responsible for global field operations.

In 2007, he moved to FEI company as senior executive, holding various positions responsible for sales and service, global business operations, and finally as chief operating officer. In 2015, Mr Loh joined VAT Vacuum Valves, based in Switzerland, as executive vice president and member of the Group Management Board, where he was responsible for and led worldwide sales and marketing until late 2017. Mr Loh is a non-executive director of ASMPT, and in the past also held positions as non-executive director in several companies (Schneeberger, Schweiter Technologies AG, and Liteq BV). He was also an advisory board member of Semi China.

Mr Loh has a wealth of experience working in the electronics and semiconductor industry, and vast experience as a leader. Mr Loh has a bachelor's degree in electronic engineering from the Tohoku University in Japan. Mr Loh is a member to the SEMI International Board and a non-executive director of ASMPT Ltd (‘ASMPT’). He is of Singaporean nationality, but has spent the last 30 years living mostly outside of Singapore – in Japan, Hong Kong, China, the UK, the Netherlands and the US. 

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