SONORA is named after the blossoming Sonoran desert near Phoenix, Arizona. The look and feel of the SONORA system reflects the colors of the Saturn rockets from the Space Age - a time when semiconductor technology was given a huge boost. It is also the era that gave birth to ASM, and so the SONORA® color scheme creates a link to ASM’s more than 50-year legacy in semiconductor processing equipment.

SONORA® BENEFITS

• Highest productivity and lowest cost of ownership in its class
• Dual reactor, dual boat configuration in a compact footprint
• Large batch size up to 150 wafers
• Innovative gas injection system for low pressure processing provides the best within wafer uniformities throughout the entire large batch
• Process compatibility with existing ASM A412™ furnaces (>1000 shipped), for easy recipe transfer and new tool qualification​

KEY APPLICATIONS

• LPCVD doped Si, SiN, TEOS
• Diffusion, Oxidation, Wet oxidation, Anneal, Cure
• Batch ALD metal oxides, metal nitrides, SiO, SiN

SUBSTANTIAL IMPROVEMENTS FROM PREDECESSOR A412, INCLUDING:

• Up to 30% more productivity, with a reduced footprint
• >2X faster wafer cycle time
• Increased reliability, better repeatability, improved ease of use
• ~50% faster installation time

SONORA PRODUCTIVITY AND SERVICEABILITY BENEFITS:

• Novel system architecture that optimizes floor space productivity as well as service area.
• Dedicated process modules with individually controlled high purity mini-environments.
• Up to 30% productivity increase due to larger process wafer load sizes combined with an updated control system, new robots, faster wafer cooldown, faster boat exchange modules.
• Large FOUP stocker for continuous processing.
• Higher productivity also results in lower energy and chemical usage per wafer.
• Design for serviceability leading to better access for all maintenance activities.

SONORA CONTROLS BENEFITS:

• Interactive Graphical User Interface for fast tool learning
• Predictive maintenance by advanced control diagnostics
• Advanced High- and Low-Level tool diagnostics
• Large touch screen
• Supervisor Remote GUI