Low Pressure Chemical Vapor Deposition & DIFFUSION - products
Low Pressure Chemical Vapor Deposition (LPCVD) is a thermal process that deposits various films at low pressure. Diffusion (sometimes referred to as annealing) is a thermal treatment used to move dopants, or impurities, and make dopants introduced by ion implantation electrically active.
Advance® Series Vertical Furnaces provide a wide range of high-productivity batch processing solutions for Diffusion, Oxidation, Anneal, Cure and LPCVD. In addition, ALD capability is available for the Advance furnaces further exploiting the benefits of their batch productivity.