Plasma-Enhanced Chemical Vapor Deposition
In PECVD, one or more gaseous reactants are used to form a solid insulating or conducting layer on the surface of a wafer. This layer is then enhanced by the use of a vapor containing electrically-charged particles or plasma, at lower temperatures.
WHAT HAPPENS DURING PECVD?
PECVD processing enables deposition at lower temperatures. A plasma is formed from the gaseous chemicals in a reaction chamber. In contrast to traditional CVD, where higher temperature is used to cause reactions, in PECVD the plasma provides the energy needed to cause the reaction, which means that it can be done at a lower temperature.
PECVD gives manufacturers a high throughput capability for the increasing demands of low thermal budget applications.